3 results
Study on the Polycrystalline Silicon Films Deposited by Inductively Coupled Plasma Chemical Vapor Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 685 / 2001
- Published online by Cambridge University Press:
- 17 March 2011, D5.2.1
- Print publication:
- 2001
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Dependence of Thermally Induced Metastability on Hydrogen Content in Amorphous Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 297 / 1993
- Published online by Cambridge University Press:
- 01 January 1993, 255
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- 1993
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Hydrogenation of B and P Implanted LPCVD Amorphous Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 258 / 1992
- Published online by Cambridge University Press:
- 21 February 2011, 87
- Print publication:
- 1992
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